Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
 
Chapter 7: Applications: MEMS, Sensors
 

Performance Limits of Micromachined Tunable-Cavity Filter

Authors:J-S. Moon and A. Shkel
Affilation:University of California Irvine, US
Pages:278 - 281
Keywords:Fabry-Perot interferometer, etalon, surface micromachining, multiphysics modeling, MEMS Fabry-Perot interferometer, etalon, surface micromachining, multiphysics modeling, MEMS
Abstract:This paper focuses on the performance limits of a tunable-cavity Fabry-Perot filter (FPF)implemented using MEMS technology.This is a versatile device capable of many functions,including light modulation and high precision sensing.Our goal is to explore challenges and opportunities i implementing tunable-cavity filter using MEMS technology.Thermal stability and effects of fabrication imperfections are studied.Based o coupled-field modeling analysis,it is concluded that the device is extremely sensitive to thermal fluctuations and fabrication imperfections degrading performance significantly. It is emphasized that if these challenges are appropriately addressed,the device will be a low cost alternative to existing DWDM filters and variety of precision sensors.
Performance Limits of Micromachined Tunable-Cavity FilterView PDF of paper
ISBN:0-9708275-0-4
Pages:638
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