Authors: J-S. Moon and A. Shkel
Affilation: University of California Irvine, United States
Pages: 278 - 281
Keywords: Fabry-Perot interferometer, etalon, surface micromachining, multiphysics modeling, MEMS Fabry-Perot interferometer, etalon, surface micromachining, multiphysics modeling, MEMS
This paper focuses on the performance limits of a tunable-cavity Fabry-Perot filter (FPF)implemented using MEMS technology.This is a versatile device capable of many functions,including light modulation and high precision sensing.Our goal is to explore challenges and opportunities i implementing tunable-cavity filter using MEMS technology.Thermal stability and effects of fabrication imperfections are studied.Based o coupled-field modeling analysis,it is concluded that the device is extremely sensitive to thermal fluctuations and fabrication imperfections degrading performance significantly. It is emphasized that if these challenges are appropriately addressed,the device will be a low cost alternative to existing DWDM filters and variety of precision sensors.