Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Applications: MEMS, Sensors

Coupled Electrostatic-Structures-Fluidic Analysis of a Micromirror

Authors:M. Turowski, E. Chan and P. Dionne
Affilation:CFD Research Corporation, US
Pages:274 - 277
Keywords:MEMS, optical switches, micromirrors, 3D simulations, fluid-structure interaction
Abstract:For micromirrors used in optical MEMS, in addition to the static displacement-voltage characteristics, the accurate transient characterization of these devices is becoming increasingly important. The latter one is strongly affected by the viscous damping
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