Coupled Electrostatic-Structures-Fluidic Analysis of a Micromirror
Authors:
M. Turowski, E. Chan and P. Dionne
Affilation:
CFD Research Corporation, U.S.A.
Pages:
274 - 277
Keywords:
MEMS, optical switches, micromirrors, 3D simulations, fluid-structure interaction
Abstract:
For micromirrors used in optical MEMS, in addition to the static displacement-voltage characteristics, the accurate transient characterization of these devices is becoming increasingly important. The latter one is strongly affected by the viscous damping
