Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Coupled Electrostatic-Structures-Fluidic Analysis of a Micromirror

Authors: M. Turowski, E. Chan and P. Dionne

Affilation: CFD Research Corporation, United States

Pages: 274 - 277

Keywords: MEMS, optical switches, micromirrors, 3D simulations, fluid-structure interaction

Abstract:
For micromirrors used in optical MEMS, in addition to the static displacement-voltage characteristics, the accurate transient characterization of these devices is becoming increasingly important. The latter one is strongly affected by the viscous damping


ISBN: 0-9708275-0-4
Pages: 638

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