Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope

Authors: W.O. Davis and A.P. Pisano

Affilation: University of California, Berkeley, United States

Pages: 270 - 273

Keywords: MEMS, gyroscope, nonlinear, suspension

Abstract:
We present a method for the calculation of the coefficients of cubic stiffening for tether-suspended micromachined systems. The analysis is based on a nonlinear rod theory, and enables the prediction of the maximum achievable motion amplitude prior to the onset of nonlinear behavior. The analysis is applied in detail to a microgyroscope. Comparisons with a finite element model and experimental data are used to validate the analysis, and issues pertaining to the optimal design of the gyroscope's suspension are investigated.

Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope

ISBN: 0-9708275-0-4
Pages: 638