Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope

	Nanotech 2001 Vol. 1 Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems Chapter 7: Applications: MEMS, Sensors
	Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope
Authors:	W.O. Davis and A.P. Pisano
Affilation:	University of California, Berkeley, US
Pages:	270 - 273
Keywords:	MEMS, gyroscope, nonlinear, suspension
Abstract:	We present a method for the calculation of the coefficients of cubic stiffening for tether-suspended micromachined systems. The analysis is based on a nonlinear rod theory, and enables the prediction of the maximum achievable motion amplitude prior to the onset of nonlinear behavior. The analysis is applied in detail to a microgyroscope. Comparisons with a finite element model and experimental data are used to validate the analysis, and issues pertaining to the optimal design of the gyroscope's suspension are investigated.
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ISBN:	0-9708275-0-4
Pages:	638
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