Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
 
Chapter 7: Applications: MEMS, Sensors
 

Finite Element Analysis in the Development of MEMS-based Compound Grating (MCG)

Authors:Y. Yao, J. Castracane, B. Xu, S. Olson and J.V. Eisden
Affilation:University at Albany-SUNY, US
Pages:386 - 389
Keywords:MEMS, modeling and simulation, finite element method, micrograting, diffraction grating
Abstract:This paper presents the development of the 1 mm ruled MEMS-based Compound Grating (MCG) in which the structural material of the rulings is SiO2 coated with Cr/Au as the top electrode. The MEMS simulation package IntelliSuiteTM is used to determine the structural dimensions and to study the electrical actuation property. Four different versions of MCGs are studied. The lengths of the rulings vary from 100 mm to 150 mm. Using Finite Element Analysis, the structural integrity is examined and the electrical actuation properties are predicted. Finally, the device prototypes are successfully fabricated and initial experimental results are compared with the simulation results.
Finite Element Analysis in the Development of MEMS-based Compound Grating (MCG)View PDF of paper
ISBN:0-9708275-0-4
Pages:638
Up
© 2014 Nano Science and Technology Institute. All Rights Reserved.
Terms of Use | Privacy Policy | Contact Us | Site Map