Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Applications: MEMS, Sensors

Eigenvalue Analysis of Tunable Micro-mechanical Actuator

Authors:W-S. Lee, K-C. Kwon, B-K. Kim, J-H. Cho and S-K. Youn
Affilation:KAIST, KR
Pages:378 - 381
Keywords:electrostatic, frequency shifting, numerical method, coupled analysis
Abstract:An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the electrostatic for
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