Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Applications: MEMS, Sensors

Thermal Modeling of a Surface-micromachined Linear Thermomechanical Actuator

Authors:C.D. Lott, T.W. McLain, J.N. Harb and L.L. Howell
Affilation:Brigham Young University, DE
Pages:370 - 373
Keywords:microactuator, thermomechanical actuator
Abstract:The thermal behavior of a thermomechanical in-plane microactuator is modeled using a finite-difference approach. Steady-state temperature profiles from the model are presented for a microactuator operating in air and a vacuum. The model is validated by comparing the actuator displacements predicted by the model with those obtained experimentally. Initial results demonstrate significant improvements in the steady-state efficiency of the microactuator when it is operated in a vacuum.
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