Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Applications: MEMS, Sensors

A Simple and Scalable Model for Spiral Inductors on Silicon

Authors:C.B. Sia, K.S. Yeo, W.L. Goh, T.N. Swe, J.G. Ma, M.A. Do, J.S. Lin and L. Chan
Affilation:Nanyang Technological University, US
Pages:358 - 361
Keywords:spiral inductor, physical model, inductance, quality factor and skin effect
Abstract:A new, simple and scalable inductor model for silicon-based spiral inductors has been presented in this paper. Compared to the conventional model, it can predict accurately the inductive characteristics and quality factor for inductors of different sizes. Introduction of a physical, non-frequency dependent resistive element to model conductor skin effects offers simplicity and accuracy to the modeling process of planar spiral inductors.
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