Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives

	Nanotech 2001 Vol. 1 Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems Chapter 7: Applications: MEMS, Sensors
	Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives
Authors:	M. Jianqiang, C. Shixin and L. Yi
Affilation:	Data Storage Institute, SG
Pages:	350 - 353
Keywords:	single crystal silicon, microactuator, simulation, hard disk drive
Abstract:	The modeling and simulation of a single crystal silicon microactuator for high-density hard disk drives are described in this paper. The microactuator is fabricated by LISA process, which has an electrically isolated structure directly from a single cryst
	View PDF of paper
ISBN:	0-9708275-0-4
Pages:	638
Special:	3 CD Set — 15% off with Free Shipping
Up