Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
 
Chapter 7: Applications: MEMS, Sensors
 

Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives

Authors:M. Jianqiang, C. Shixin and L. Yi
Affilation:Data Storage Institute, SG
Pages:350 - 353
Keywords:single crystal silicon, microactuator, simulation, hard disk drive
Abstract:The modeling and simulation of a single crystal silicon microactuator for high-density hard disk drives are described in this paper. The microactuator is fabricated by LISA process, which has an electrically isolated structure directly from a single cryst
Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk DrivesView PDF of paper
ISBN:0-9708275-0-4
Pages:638
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