Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope
W.O. Davis and A.P. Pisano
University of California, Berkeley, US

Coupled Electrostatic-Structures-Fluidic Analysis of a Micromirror
M. Turowski, E. Chan and P. Dionne
CFD Research Corporation, US

Performance Limits of Micromachined Tunable-Cavity Filter
J-S. Moon and A. Shkel
University of California Irvine, US

Simulation of Shape Memory Devices with Coupled Finite Element Programs
B. Krevet and M. Kohl
Forschungszentrum Karlsruhe, DE

Modeling a High Power Density MEMS Magnetic Induction Machine
H. Köser and J.H. Lang
Massachusetts Institute of Technology, US

Multiple Solutions in Electrostatic MEMS
J.A. Pelesko
Georgia Institute of Technology, US

Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA
S. Basrour, H. Majjad, J.R. Coudevylle and M. de Labachèlerie
CNRS, FR

Thermal Frequency Drift of Resonant Microsensor
F. Shen, P. Lu, S.J. O'Shea, K.H. Lee, S.C. Pradhan and T.Y. Ng
Institute for High Performance Computing, SG

Vibration Analysis of Quartz Yaw-Rate Sensor to Reduce Mechanical Coupling
M. Fujiyoishi, Y. Nononmura, Y. Omura, K. Tsukada, S. Matsushige and N. Kurata
Toyota Central R&D Labs, JP

Modeling and Analysis of Hysteresis Phenomena in Electrostatic Zipper Actuators
P. Guidotti and D. Bernstein
California Institute of Technology, US

Surface Chemistry Effects in Finite Element Modeling of Heat Transfer in µ-fuel Cells
M.A. Havstad
Lawrence Livermore National Laboratory, US

The Applicability of Temperature Correction to Chemoresistive Sensors in an e-NOSE-ANN System
R. Hobson and A. Guiseppi-Elie
Commonwealth University, US

Electromechanical and Microwave S-parameter Properties of a Wide Tuning Range MEMS Tunable Capacitor
J. Chen, J. Zou, C. Liu and S-M. Kang
University of Illinois, CN

Development of Patterned SMA Strips as Self-Heating Resistors
J. Chen, B.C. Cai, D. Xu, L. Wang and X.L. Cheng
Shanghai Jiao Tong University, SG

Effects of Slider-Driven Piezo-Microactuator Placements and Profiles on HGA Sway Mode
J.P. Yang and S.X. Chen
National University of Singapore, US

Modeling and Simulation of THUNDER Actuators Using ANSYS Finite Element Analysis
C. Kennedy, T. Usher, J. Mulling and A. Kingon
Think Peak, Inc., DE

Modeling and Dynamic Simulation of Electrostatically Driven Micromirror
S. Kweon, H. Lee and H. Shin
Samsung Electronics Co., LTD., US

A Novel Polymer Nanofiber Interface for Chemical and Biochemical Sensor Applications
S.J. Kwoun, R.M. Lee, B. Han and F.K. Ko
Drexel University, US

On the Utility of Airborne MEMS for Improving Meteorological Analysis and Forecasting
J. Manobianco and D.A. Short
ENSCO, Inc., JP

MEMS Simulation in Heavily Doped Silicon Devices
K. Matsuda and Y. Kanda
Naruto University of Education, US

Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives
M. Jianqiang, C. Shixin and L. Yi
Data Storage Institute, SG

Study of a Novel Isotropic Suspension Design for an Angular Gyroscope
C. Painter and A. Shkel
University of California-Irvine, US

A Simple and Scalable Model for Spiral Inductors on Silicon
C.B. Sia, K.S. Yeo, W.L. Goh, T.N. Swe, J.G. Ma, M.A. Do, J.S. Lin and L. Chan
Nanyang Technological University, US

An Accurate Photodiode Model for DC and High Frequency SPICE Circuit Simulation
T.N. Swe and K.S. Yeo
Nanyang Technological University, SG

Investigation into the Standardization of Micromechanical Components and their Simulation and Computation Using FEM -- Case Study of Diaphragms
E. Weiss, E.G. Welp, U. Witzel, A. Wieck and E. Schmidt
Ruhr University Bochum, DE

Thermal Modeling of a Surface-micromachined Linear Thermomechanical Actuator
C.D. Lott, T.W. McLain, J.N. Harb and L.L. Howell
Brigham Young University, DE

Modeling the Effects of Joint Clearances in Planar Micromechanisms
J.W. Wittwer, L.L. Howell and K.W. Chase
Brigham Young University, US

Eigenvalue Analysis of Tunable Micro-mechanical Actuator
W-S. Lee, K-C. Kwon, B-K. Kim, J-H. Cho and S-K. Youn
KAIST, KR

Modeling and Simulation on Two Passive Feedback Methods to Obtain Large Travel Range of Electrostatic Micro Mirrors
X.T. Wu, Z.X. Xiao, J. Zhe and K.R. Farmer
New Jersey Institute of Technology, US

Finite Element Analysis in the Development of MEMS-based Compound Grating (MCG)
Y. Yao, J. Castracane, B. Xu, S. Olson and J.V. Eisden
University at Albany-SUNY, US


ISBN: 0-9708275-0-4
Pages: 638