Microsystem Model Evaluation Using Optimization Strategies

	Nanotech 2001 Vol. 1 Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems Chapter 5: Optimization
	Microsystem Model Evaluation Using Optimization Strategies
Authors:	D. Peters and R. Laur
Affilation:	University of Bremen, DE
Pages:	161 - 164
Keywords:	behavioral modeling, model evaluation, opti-mization, microsystem design
Abstract:	This paper presents an automatic approach for evaluating behavioral models of micro systems' components. Optimization methods are applied aiming at the specification of a model's scope of application. The method is presented by evaluating a behavioral model of a capacitive pressure sensor. The model incorporates a new approach for the calculation of the sensor's bending line. It considers small as well as large deflections.
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ISBN:	0-9708275-0-4
Pages:	638
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