Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 5: Optimization

Microsystem Model Evaluation Using Optimization Strategies

Authors:D. Peters and R. Laur
Affilation:University of Bremen, DE
Pages:161 - 164
Keywords:behavioral modeling, model evaluation, opti-mization, microsystem design
Abstract:This paper presents an automatic approach for evaluating behavioral models of micro systems' components. Optimization methods are applied aiming at the specification of a model's scope of application. The method is presented by evaluating a behavioral model of a capacitive pressure sensor. The model incorporates a new approach for the calculation of the sensor's bending line. It considers small as well as large deflections.
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