Authors: D. Peters and R. Laur
Affilation: University of Bremen, Germany
Pages: 161 - 164
Keywords: behavioral modeling, model evaluation, opti-mization, microsystem design
This paper presents an automatic approach for evaluating behavioral models of micro systems' components. Optimization methods are applied aiming at the specification of a model's scope of application. The method is presented by evaluating a behavioral model of a capacitive pressure sensor. The model incorporates a new approach for the calculation of the sensor's bending line. It considers small as well as large deflections.