Authors: E. Sacks and S.M. Barnes
Affilation: Purdue University, United States
Pages: 144 - 147
Keywords: MEMS, micro-mechanical design, configu-ration space, Summit
We have developed an interactive computer-aided design program that supports the mechanical design of devices fabricated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation and kinematic tolerance analysis, and supports kinematic synthesis. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to redesign and validate a torsional ratcheting actuator fabricated at Sandia with the SUMMiT V process.