Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 5: Optimization

Computer-Aided Kinematic Design of a Torsional Ratcheting Actuator

Authors:E. Sacks and S.M. Barnes
Affilation:Purdue University, US
Pages:144 - 147
Keywords:MEMS, micro-mechanical design, configu-ration space, Summit
Abstract:We have developed an interactive computer-aided design program that supports the mechanical design of devices fabricated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation and kinematic tolerance analysis, and supports kinematic synthesis. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to redesign and validate a torsional ratcheting actuator fabricated at Sandia with the SUMMiT V process.
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