Authors: M.D. Pottenger and W.J. Kaiser
Affilation: University of California at Los Angeles, United States
Pages: 140 - 143
Keywords: inertial sensor, noise, simulation, SPICE
Methos for incorporation noise models into full-system inertial microsensor simulation are presented. Thermal motion of the proof mass and flicker noise in the interface circuit exhibit essential behaviore that must be included in sensor design. While typically described in terms of frequency spectra, these noise sources must be developed for transient simulation-inertial microsensors display nonlinarity and time dependence that invalidates any small-signal frequency domain simulation. THe methos for thermal noise modeling also allow transfer function data to be obtained. Results are given for flicker noise characterization and a voltage-controlled oscillator, including both magnitude and phase information. The noise modeling methods complemenet a complete inertial microsensor simulation model that has been developed in the SPICE circuit simulator environment.