Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Optimization Chapter 5

Optimization of Integrated Magnetic Field Sensors

Authors: J. Lienemann, A. Greiner, J.G. Korvink and O. Sigmund

Affilation: Albert Ludwig University, Germany

Pages: 120 - 123

Keywords: topology optimization, Integrated magnetic field sensor, Hall plate, offset, sensitivity

Abstract:
We present an optimization strategy for the offset reduction of integrated magnetic field sensors with simultaneous maximization of sensitivity. We use the topology optimization method to automatically find a design with maximal sensitivity for given constraints on the offset by changing the conductivity of the Hall plate locally.

Optimization of Integrated Magnetic Field Sensors

ISBN: 0-9708275-0-4
Pages: 638