Authors: J. Lienemann, A. Greiner, J.G. Korvink and O. Sigmund
Affilation: Albert Ludwig University, Germany
Pages: 120 - 123
Keywords: topology optimization, Integrated magnetic field sensor, Hall plate, offset, sensitivity
We present an optimization strategy for the offset reduction of integrated magnetic field sensors with simultaneous maximization of sensitivity. We use the topology optimization method to automatically find a design with maximal sensitivity for given constraints on the offset by changing the conductivity of the Hall plate locally.