Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Optimization Chapter 5

Optimization of Integrated Magnetic Field Sensors

Authors: J. Lienemann, A. Greiner, J.G. Korvink and O. Sigmund

Affilation: Albert Ludwig University, Germany

Pages: 120 - 123

Keywords: topology optimization, Integrated magnetic field sensor, Hall plate, offset, sensitivity

We present an optimization strategy for the offset reduction of integrated magnetic field sensors with simultaneous maximization of sensitivity. We use the topology optimization method to automatically find a design with maximal sensitivity for given constraints on the offset by changing the conductivity of the Hall plate locally.

Optimization of Integrated Magnetic Field Sensors

ISBN: 0-9708275-0-4
Pages: 638