Optimization of Integrated Magnetic Field Sensors

	Nanotech 2001 Vol. 1 Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems Chapter 5: Optimization
	Optimization of Integrated Magnetic Field Sensors
Authors:	J. Lienemann, A. Greiner, J.G. Korvink and O. Sigmund
Affilation:	Albert Ludwig University, DE
Pages:	120 - 123
Keywords:	topology optimization, Integrated magnetic field sensor, Hall plate, offset, sensitivity
Abstract:	We present an optimization strategy for the offset reduction of integrated magnetic field sensors with simultaneous maximization of sensitivity. We use the topology optimization method to automatically find a design with maximal sensitivity for given constraints on the offset by changing the conductivity of the Hall plate locally.
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ISBN:	0-9708275-0-4
Pages:	638
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