Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 4: System Level Modeling

Efficient Simulation of MEMS Using Element Stamps

Authors:G. Casinovi
Affilation:Georgia Institute of Technology, US
Pages:112 - 115
Keywords:efficient simulation, element stamps, HDL, MEMS
Abstract:This paper describes an approach to MEMS simulation based on so-called element stamps, which are the building blocks of conventional circuit simulators. Stamps are derived from lumped-constant models of individual electromechanical devices, and built into the simulator. When a system is simulated, the equations describing its behavior can be built and solved in a systematic and efficient way using the stamps of its constitutive elements. This makes the simulation faster and more efficient, compared to simulators that rely on models written in hardware description languages. Numerical results obtained from the simulation of a simple electromechanical system containing a linear comb-drive accelerometer are presented.
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