Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
 
Chapter 4: System Level Modeling
 

Closed Loop Micromachined Inertial Sensors with Higher Order SD-Modulators

Authors:M. Kraft, W. Redman-White and M.E. Mokhtari
Affilation:University of Southampton, UK
Pages:104 - 107
Keywords:inertial sensor, sigma-delta modulator, accelerometer, noise shaping
Abstract:Micromachined inertial sensors are often incorporated in closed loop force feedback structures; a particularly advantageous approach is based upon the inclusion of the sensing element in a sigma-delta modulator (SDM) type control structure. The order of the SDM, and hence the noise shaping properties, is usually limited by the dynamics of the mechanical sensing element and may be insufficient for high performance applications. This paper presents a novel approach suggesting the use of a sigma-delta modulator with an order higher than the mechanical sensing element. This is achieved by a modified cascaded (or MASH) SDM loop architecture. A model of the electromechanical MASH is presented and the quantisation noise analysis is derived. Simulation results indicate nearly 30 dB increase in signal to quantisation noise ratio.
Closed Loop Micromachined Inertial Sensors with Higher Order SD-ModulatorsView PDF of paper
ISBN:0-9708275-0-4
Pages:638
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