Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

System Level Modeling Chapter 4

Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels

Authors: T. Veijola

Affilation: Helsinki University of Technology, Finland

Pages: 96 - 99

Keywords: gas flow in rectangular channels, slip flow, gas flow in microstructures, acoustic impedance, oscillating gas flow

Abstract:
Acoustic impedance models for gas flow in rectangular channels are presented. The models include the effect of slightly rarefied gas (slip-flow region) and the fluid inertia effects. An equivalent circuit is presented that implements the acoustic impedance of a rectangular flow channel. Utilizing these models, acoustic impedance circuits can be constructed to model damping problems, such as the squeezed-film damping of fast oscillating microstructures with dimensions comparable to the mean free path.

Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels

ISBN: 0-9708275-0-4
Pages: 638