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 | Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 4: System Level Modeling |
| | Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels | | Authors: | T. Veijola | | Affilation: | Helsinki University of Technology, Finland | | Pages: | 96 - 99 | | Keywords: | gas flow in rectangular channels, slip flow, gas flow in microstructures, acoustic impedance, oscillating gas flow | | Abstract: | Acoustic impedance models for gas flow in rectangular channels are presented. The models include the effect of slightly rarefied gas (slip-flow region) and the fluid inertia effects. An equivalent circuit is presented that implements the acoustic impedance of a rectangular flow channel. Utilizing these models, acoustic impedance circuits can be constructed to model damping problems, such as the squeezed-film damping of fast oscillating microstructures with dimensions comparable to the mean free path. |  | View paper | | ISBN: | 0-9708275-0-4 |
| Pages: | 638 |
| Hardcopy: | $100.00 |
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