Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 4: System Level Modeling

Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels

Authors:T. Veijola
Affilation:Helsinki University of Technology, FI
Pages:96 - 99
Keywords:gas flow in rectangular channels, slip flow, gas flow in microstructures, acoustic impedance, oscillating gas flow
Abstract:Acoustic impedance models for gas flow in rectangular channels are presented. The models include the effect of slightly rarefied gas (slip-flow region) and the fluid inertia effects. An equivalent circuit is presented that implements the acoustic impedance of a rectangular flow channel. Utilizing these models, acoustic impedance circuits can be constructed to model damping problems, such as the squeezed-film damping of fast oscillating microstructures with dimensions comparable to the mean free path.
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