Authors: G. Schrag, P. Voigt and G. Wachutka
Affilation: Munich University of Technology, Germany
Pages: 92 - 95
Keywords: squeeze film damping effects, mixed level simulation, compact modeling, non-trivial geometries
We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which allows for including the damping effects in system-level models of entire microsystems in a natural physical-based way. It also provides very large flexibility with respect to device geometry and the constituent components of a microsystem. The proposed damping model is realized in VHDL-AMS and can be easily included in system level models for full system simulation. The method has been successfully demonstrated for ele-mentary micromechanical structures. The results from the mixed level simulation approach conform very well with 3D-Navier-Stokes-based FEM simulations showing the applicability of our methodology.