Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Compact Modeling and Model Order Reduction Chapter 3

Compact Model for the Squeezed-Film Damping Including the Open Border Effects

Authors: T. Veijola, K. Ruokonen and I. Tittonen

Affilation: Helsinki University of Technology, Finland

Pages: 76 - 79

Keywords: gas damping, damping in microstructures, Reynolds equation, acoustic impedance, fringe flow

Abstract:
A numerical model for the squeezed-film damping between moving rigid, rectangular surfaces is presented. The emphasis is on the nontrivial boundary conditions for the flow, accounting for the finite acoustic impedance of the surrounding gas at the borders. The previously published electrical-equivalent macro model is modified to account for the end effects. The model is usable in simulating the circuit level and the system level behavior of gas-damped devices in the time- and frequency domains.

Compact Model for the Squeezed-Film Damping Including the Open Border Effects

ISBN: 0-9708275-0-4
Pages: 638