Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Compact Modeling and Model Order Reduction Chapter 3

New Numerical Techniques and Tools in SUGAR for 3D MEMS Simulation

Authors: Z. Bai, D. Bindel, J. Clark, J. Demmel, K. Pister and N. Zhou

Affilation: University of California Davis, United States

Pages: 31 - 34

Keywords: MEMS, SUGAR, modified nodal analysis, scaling, reduced-order modeling

SUGAR is a modified nodal analysis package for 3D MEMS simulations that owes its heritage and its name to the SPICE family of circuit simulation. SUGAR has undergone the stage of proof-of-concept which showed that modified nodal analysis was in fact just as accurate and much faster than finite element simulation on many MEMS problems. The upcoming major release of SUGAR is verions 2.0, which includes a number of new features, such as thermal expansion, linearly and rotationally accelerating frames, residual strain gradient, nonlinear stiffness and user-defined models. In this paper, we introduce two new numerical techniques and tools to be incorporated in the future release os SUGAR, namely scaling schemes to remedy artificial ill-conditioning and Krylov subspace based reduced-order modeling techniques for efficient transient analysis of dynamic systems.

New Numerical Techniques and Tools in SUGAR for 3D MEMS Simulation

ISBN: 0-9708275-0-4
Pages: 638