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 | Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 3: Compact Modeling and Model Order Reduction |
| | Scalable Macromodels for Microelectromechanical Systems | | Authors: | V. Srinivasan, A. Jog and R.B. Fair | | Affilation: | Duke University, U.S.A. | | Pages: | 72 - 75 | | Keywords: | reduced-order model, MEMS, macromodels, Krylov subspaces. | | Abstract: | A fully automatic macromodeling methodology to generate scalable reduced-order models for microelectromechanical systems is presented in this paper. Krylov subspace methods are used to generate reduced-order models from detailed higher-order models of the device under consideration. The entire methodology is implemented in a symbolic computation environment to preserve dependencies on physical device parameters. The macromodeling methodology is demonstrated using the combdrive microresonator as a representative example. The results are compared with analytical models, NODAS and finite element simulations. |  | View paper | | ISBN: | 0-9708275-0-4 |
| Pages: | 638 |
| Hardcopy: | $100.00 |
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