Scalable Macromodels for Microelectromechanical Systems

	Nanotech 2001 Vol. 1 Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems Chapter 3: Compact Modeling and Model Order Reduction
	Scalable Macromodels for Microelectromechanical Systems
Authors:	V. Srinivasan, A. Jog and R.B. Fair
Affilation:	Duke University, US
Pages:	72 - 75
Keywords:	reduced-order model, MEMS, macromodels, Krylov subspaces.
Abstract:	A fully automatic macromodeling methodology to generate scalable reduced-order models for microelectromechanical systems is presented in this paper. Krylov subspace methods are used to generate reduced-order models from detailed higher-order models of the device under consideration. The entire methodology is implemented in a symbolic computation environment to preserve dependencies on physical device parameters. The macromodeling methodology is demonstrated using the combdrive microresonator as a representative example. The results are compared with analytical models, NODAS and finite element simulations.
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ISBN:	0-9708275-0-4
Pages:	638
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