Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 3: Compact Modeling and Model Order Reduction

Scalable Macromodels for Microelectromechanical Systems

Authors:V. Srinivasan, A. Jog and R.B. Fair
Affilation:Duke University, US
Pages:72 - 75
Keywords:reduced-order model, MEMS, macromodels, Krylov subspaces.
Abstract:A fully automatic macromodeling methodology to generate scalable reduced-order models for microelectromechanical systems is presented in this paper. Krylov subspace methods are used to generate reduced-order models from detailed higher-order models of the device under consideration. The entire methodology is implemented in a symbolic computation environment to preserve dependencies on physical device parameters. The macromodeling methodology is demonstrated using the combdrive microresonator as a representative example. The results are compared with analytical models, NODAS and finite element simulations.
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