Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Compact Modeling and Model Order Reduction Chapter 3

Table-Based Numerical Macromodeling for MEMS Devices

Authors: J. Wu and L.R. Carley

Affilation: Carnegie Mellon University, United States

Pages: 68 - 71

Keywords: table-based numerical model, cubic spline interpolation, linear fractional transformation

In this paper, we present a table-based numerical macromodeling method in which a MEMS device is modeled by a set of numerical ordinary differential equations and model functions are represented by look-up tables of numerical data. Cubic spline interpolation is used to evaluate model functions during simulation. Numerical linear models are also constructed for DC analysis, AC analysis and feedback system design. This method is demonstrated by modeling and simulating a MEMS accelerometer.

Table-Based Numerical Macromodeling for MEMS Devices

ISBN: 0-9708275-0-4
Pages: 638