Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 3: Compact Modeling and Model Order Reduction

Table-Based Numerical Macromodeling for MEMS Devices

Authors:J. Wu and L.R. Carley
Affilation:Carnegie Mellon University, US
Pages:68 - 71
Keywords:table-based numerical model, cubic spline interpolation, linear fractional transformation
Abstract:In this paper, we present a table-based numerical macromodeling method in which a MEMS device is modeled by a set of numerical ordinary differential equations and model functions are represented by look-up tables of numerical data. Cubic spline interpolation is used to evaluate model functions during simulation. Numerical linear models are also constructed for DC analysis, AC analysis and feedback system design. This method is demonstrated by modeling and simulating a MEMS accelerometer.
Table-Based Numerical Macromodeling for MEMS DevicesView PDF of paper
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