Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Compact Modeling and Model Order Reduction Chapter 3

Full Wave Electromagnetic Analysis and Model Order Reduction for Complex Three Dimensional Structures

Authors: I. Balk and Y. He

Affilation: IntelliSense Corporation, United States

Pages: 64 - 67

Keywords: MEMS, model order reduction, full-wave electromagnetic model, CAD, interconnect, packaging

Abstract:
Progress in MEMS and packaging design has made significant changes in the requirements for modeling tools. In order to design a modern microdevice or interconnect system it is no longer sufficient to limit the analysis to quasielectrostatic modeling due to smaller size and higher operation frequencies of the microdevices. On the other hand, a ‘full-wave’ analysis produces huge systems of equations which require tremendous amounts of computational resources. The method described in this paper is a combination of three-dimensional full-wave coupled RLC electromagnetic analysis and passive Arnoldy based model order reduction algorithm and allows to solve wider range of design problems including miniaturization and high frequency modeling problems.

Full Wave Electromagnetic Analysis and Model Order Reduction for Complex Three Dimensional Structures

ISBN: 0-9708275-0-4
Pages: 638