Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
 
Chapter 3: Compact Modeling and Model Order Reduction
 

Experimental Determination of Electrical, Metallurgical, and Physical Gate Lengths of Submicron MOSFET’s

Authors:X. Zhou and K.Y. Lim
Affilation:Nanyang Technological University, SG
Pages:44 - 47
Keywords:effective channel length, metallurgical channel length, LDD lateral diffusion, critical-dimension correction, critical-current at linear-threshold, MOSFET
Abstract:A simple, empirically-based method is developed for extraction of submicron surface-channel MOSFET’s effective channel length (Leff) with critical-dimension correction to poly-gate length (Lg) and correlation to metallurgical channel length (Lmet). A self-consistent compact model for the lightly-doped drain (LDD) lateral diffusion is proposed, which can be correlated to the extracted Leff. The combined experimental determination of Leff, Lmet, and Lg further validates the proposed “critical-current at linear-threshold” (“Icrit@Vt0”) Leff-extraction method, and provides important applications in statistical process control and monitoring as well as deep-submicron (DSM) technology characterization and device modeling.
Experimental Determination of Electrical, Metallurgical, and Physical Gate Lengths of Submicron MOSFET’sView PDF of paper
ISBN:0-9708275-0-4
Pages:638
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