Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 2: Numerics, Algorithms

Automatic Generation of Small-Signal Dynamic Macromodels from 3-D Simulation

Authors:D. Ramaswamy and J.K. White
Affilation:Massachusetts Institute of Technology, US
Pages:27 - 30
Keywords:MEMS, model, reduction, arnoldi, electromechanical
Abstract:Recent algorithmic developments have greatly accelerated 3-D simulation of micromachined devices, but simulation and optimization of systems which use those devices require much more easily evaluated, yet still accurate, macromodels. In this paper we focus on generating dynamically accurate small-signal macromodels, useful in many signal processing and feedback control applications. Results are presented demonstrating that dynamically accurate macromodels for the small-signal behavior of a cantilever beam and a micromirror can be automatically generated directly from 3-D simulation.
Automatic Generation of Small-Signal Dynamic Macromodels from 3-D SimulationView PDF of paper
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