Authors: D. Ramaswamy and J.K. White
Affilation: Massachusetts Institute of Technology, United States
Pages: 27 - 30
Keywords: MEMS, model, reduction, arnoldi, electromechanical
Recent algorithmic developments have greatly accelerated 3-D simulation of micromachined devices, but simulation and optimization of systems which use those devices require much more easily evaluated, yet still accurate, macromodels. In this paper we focus on generating dynamically accurate small-signal macromodels, useful in many signal processing and feedback control applications. Results are presented demonstrating that dynamically accurate macromodels for the small-signal behavior of a cantilever beam and a micromirror can be automatically generated directly from 3-D simulation.