Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 12

A 2D Visualization Tool for SUMMiT V Designs

Authors: V.R. Yarberry and C.R. Jorgensen

Affilation: Sandia National Laboratories, United States

Pages: 606 - 609

Keywords: MEMS, SUMMiT, cross-section, process simulation

Abstract:
This paper describes the 2D Process Visualizer, a CAD tool that enables a SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to visualize the results of applying the process sequence to a mask set by generating accurate 2D cross-section

A 2D Visualization Tool for SUMMiT V Designs

ISBN: 0-9708275-0-4
Pages: 638