Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 12: Software Tools, CAD Systems

A 2D Visualization Tool for SUMMiT V Designs

Authors:V.R. Yarberry and C.R. Jorgensen
Affilation:Sandia National Laboratories, US
Pages:606 - 609
Keywords:MEMS, SUMMiT, cross-section, process simulation
Abstract:This paper describes the 2D Process Visualizer, a CAD tool that enables a SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to visualize the results of applying the process sequence to a mask set by generating accurate 2D cross-section
A 2D Visualization Tool for SUMMiT V DesignsView PDF of paper
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