Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
 
Chapter 12: Software Tools, CAD Systems
 

A Data Model for the Representation of Fabrication Dependencies Concerning Micromechanical Devices

Authors:U. Hansen and S. BĆ¼ttgenbach
Affilation:Technical University of Braunschweig, DE
Pages:586 - 589
Keywords:MEMS data model, process compatibility, MST CAD, process configuration
Abstract:Conventionally the design of a product is conducted paying only little attention to the subsequent manufacturing. Regarding micromechanical devices this is not practicable, since the design choices taken are highly dependent on the technology used for fab
A Data Model for the Representation of Fabrication Dependencies Concerning Micromechanical DevicesView PDF of paper
ISBN:0-9708275-0-4
Pages:638
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