A Data Model for the Representation of Fabrication Dependencies Concerning Micromechanical Devices
Authors:
U. Hansen and S. Büttgenbach
Affilation:
Technical University of Braunschweig, Germany
Pages:
586 - 589
Keywords:
MEMS data model, process compatibility, MST CAD, process configuration
Abstract:
Conventionally the design of a product is conducted paying only little attention to the subsequent manufacturing. Regarding micromechanical devices this is not practicable, since the design choices taken are highly dependent on the technology used for fab
