Hybrid P-Element and Trefftz Method for Capacitance Computation
Authors:
M. Gyimesi, J-S. Wang and D.F. Ostergaard
Affilation:
ANSYS, Inc., U.S.A.
Pages:
424 - 428
Keywords:
Micro Electro Mechanical Systems (MEMS), finite elements (FE), Trefftz, p-elements, capacitance, hybrid FE-Trefftz
Abstract:
The paper discusses efficient electrostatic field solutions techniques to simulate micro electro mechanical systems (MEMS): adaptive p-elements to remove the burden of manual mesh refinement; hybrid finite elements - Trefftz formulation to treat open boundary problems; energy based capacitance matrix and lumped capacitance value extraction.
