Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 9: Signal Integrity Simulation and Verification

Hybrid P-Element and Trefftz Method for Capacitance Computation

Authors:M. Gyimesi, J-S. Wang and D.F. Ostergaard
Affilation:ANSYS, Inc., US
Pages:424 - 428
Keywords:Micro Electro Mechanical Systems (MEMS), finite elements (FE), Trefftz, p-elements, capacitance, hybrid FE-Trefftz
Abstract:The paper discusses efficient electrostatic field solutions techniques to simulate micro electro mechanical systems (MEMS): adaptive p-elements to remove the burden of manual mesh refinement; hybrid finite elements - Trefftz formulation to treat open boundary problems; energy based capacitance matrix and lumped capacitance value extraction.
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