Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Characterization, Parameter Extraction, Calibration

Topics in Finite-Element Modeling of Piezoelectric MEMS Devices

Authors:F.J. von Preissig and E.S. Kim
Affilation:University of Hawaii at Manoa, US
Pages:269 - 272
Keywords:MEMS, piezoelectric, FEM, error, film
Abstract:Techniques for modeling thin-piezoelectric MEMS devices using existing finite-element packages are examined. The emphasis is on non-resonant sensors and actuators, but most results are applicable to resonant devices and large structures as well. Characteristic features and challenges of this modeling endeavor are pointed out. Piezoelectrically actuated bending is examined, and it is shown that appropriate solid elements can work remarkably efficiently despite the sheet-like structural features. Next, a method, employing finite-element analyses, for creating an equivalent circuit representing the electrical behavior of a linear device is presented. FEM discretization errors associated with this procedure are then analyzed.
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