Authors: P. Schmid, M. Adamschik, S. Ertl and E. Kohn
Affilation: University of Ulm, Germany
Pages: 237 - 240
Keywords: diamond, microswitch
CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based on technological parameters. However FEM simulations are very time consuming, thus a simple model has been developed, allowing fast calculations to predict device performance. Results obtained by the different approaches are given and compared to measured values.