Modeling of High-speed Diamond Microswitch

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 5: Equivalent Circuits, Behavioral and Multi-Level Simulation
	Modeling of High-speed Diamond Microswitch
Authors:	P. Schmid, M. Adamschik, S. Ertl and E. Kohn
Affilation:	University of Ulm, DE
Pages:	237 - 240
Keywords:	diamond, microswitch
Abstract:	CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based on technological parameters. However FEM simulations are very time consuming, thus a simple model has been developed, allowing fast calculations to predict device performance. Results obtained by the different approaches are given and compared to measured values.
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ISBN:	0-9666135-7-0
Pages:	741
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