Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 5: Equivalent Circuits, Behavioral and Multi-Level Simulation

Modeling of High-speed Diamond Microswitch

Authors:P. Schmid, M. Adamschik, S. Ertl and E. Kohn
Affilation:University of Ulm, DE
Pages:237 - 240
Keywords:diamond, microswitch
Abstract:CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based on technological parameters. However FEM simulations are very time consuming, thus a simple model has been developed, allowing fast calculations to predict device performance. Results obtained by the different approaches are given and compared to measured values.
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