Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 5: Equivalent Circuits, Behavioral and Multi-Level Simulation

Techniques for Coupled Circuit and Micromechanical Simulation

Authors:J. Chen and S-M. Kang
Affilation:University of Illinois at Urbana-Champaign, US
Pages:213 - 216
Keywords:nonlinear, dynamical, model-order reduction, composite simulation
Abstract:This paper details advanced simulation techniques for efficiently determining system behavior of integrated microsystems that contains both circuit elements and micromechanical ones. Techniques for building reduced-order dynamical models for coupled energy domain non-liner (both weakly nonlinear and strongly nonlinear) MEMS devices have been developed. An open-ended and expandable simulation framework that enables complete simulation of integrated microsystems is also implemented.
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