MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Equivalent Circuits, Behavioral and Multi-Level Simulation Chapter 5

Techniques for Coupled Circuit and Micromechanical Simulation

Authors: J. Chen and S-M. Kang

Affilation: University of Illinois at Urbana-Champaign, United States

Pages: 213 - 216

Keywords: nonlinear, dynamical, model-order reduction, composite simulation

This paper details advanced simulation techniques for efficiently determining system behavior of integrated microsystems that contains both circuit elements and micromechanical ones. Techniques for building reduced-order dynamical models for coupled energy domain non-liner (both weakly nonlinear and strongly nonlinear) MEMS devices have been developed. An open-ended and expandable simulation framework that enables complete simulation of integrated microsystems is also implemented.

Techniques for Coupled Circuit and Micromechanical Simulation

ISBN: 0-9666135-7-0
Pages: 741