Authors: J. Chen and S-M. Kang
Affilation: University of Illinois at Urbana-Champaign, United States
Pages: 213 - 216
Keywords: nonlinear, dynamical, model-order reduction, composite simulation
This paper details advanced simulation techniques for efficiently determining system behavior of integrated microsystems that contains both circuit elements and micromechanical ones. Techniques for building reduced-order dynamical models for coupled energy domain non-liner (both weakly nonlinear and strongly nonlinear) MEMS devices have been developed. An open-ended and expandable simulation framework that enables complete simulation of integrated microsystems is also implemented.