Techniques for Coupled Circuit and Micromechanical Simulation

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 5: Equivalent Circuits, Behavioral and Multi-Level Simulation
	Techniques for Coupled Circuit and Micromechanical Simulation
Authors:	J. Chen and S-M. Kang
Affilation:	University of Illinois at Urbana-Champaign, US
Pages:	213 - 216
Keywords:	nonlinear, dynamical, model-order reduction, composite simulation
Abstract:	This paper details advanced simulation techniques for efficiently determining system behavior of integrated microsystems that contains both circuit elements and micromechanical ones. Techniques for building reduced-order dynamical models for coupled energy domain non-liner (both weakly nonlinear and strongly nonlinear) MEMS devices have been developed. An open-ended and expandable simulation framework that enables complete simulation of integrated microsystems is also implemented.
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ISBN:	0-9666135-7-0
Pages:	741
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