Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 5: Equivalent Circuits, Behavioral and Multi-Level Simulation

Low Order Squeeze Film Model for Simulation of MEMS Devices

Authors:S. Vemuri, G.K. Fedder and T. Mukherjee
Affilation:Carnegie Mellon Universtiy, US
Pages:205 - 208
Keywords:squeeze film damping, low-order model, lumped parameter model
Abstract:A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity 3D numerical simulations using non-trivial boundary conditions. This low-order model has been added to the NODAS MEMS schematic library for system level design of MEMS. The results of system-level simulation of a CMOS micromechanical bandpass filter using this damping model are presented.
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