Authors: S. Vemuri, G.K. Fedder and T. Mukherjee
Affilation: Carnegie Mellon Universtiy, United States
Pages: 205 - 208
Keywords: squeeze film damping, low-order model, lumped parameter model
A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity 3D numerical simulations using non-trivial boundary conditions. This low-order model has been added to the NODAS MEMS schematic library for system level design of MEMS. The results of system-level simulation of a CMOS micromechanical bandpass filter using this damping model are presented.