Low Order Squeeze Film Model for Simulation of MEMS Devices
Authors:
S. Vemuri, G.K. Fedder and T. Mukherjee
Affilation:
Carnegie Mellon Universtiy, U.S.A.
Pages:
205 - 208
Keywords:
squeeze film damping, low-order model, lumped parameter model
Abstract:
A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity 3D numerical simulations using non-trivial boundary conditions. This low-order model has been added to the NODAS MEMS schematic library for system level design of MEMS. The results of system-level simulation of a CMOS micromechanical bandpass filter using this damping model are presented.
