Authors: H.J. Lee, S.B. Crary, B Affour, D. Bernstein, Y.B. Gianchandani, D.M. Woodcock and M.A. Maher
Affilation: MEMSCAP S.A., France
Pages: 201 - 204
Keywords: design of experiments, computer simulation, I-optimality, microaccelerometer, metamodel
We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE using T-SPICE. A five-factor microaccelerometer example demonstrates that highly accurate dynamical simulations are possible, in some cases, using a very small number of static FEA simulations.