MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Equivalent Circuits, Behavioral and Multi-Level Simulation Chapter 5

Generation of a Metamodel for a Micromachined Accelerometer using T-SpiceTM and the Iz-Optimality Option of I-OPTTM

Authors: H.J. Lee, S.B. Crary, B Affour, D. Bernstein, Y.B. Gianchandani, D.M. Woodcock and M.A. Maher

Affilation: MEMSCAP S.A., France

Pages: 201 - 204

Keywords: design of experiments, computer simulation, I-optimality, microaccelerometer, metamodel

Abstract:
We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE using T-SPICE. A five-factor microaccelerometer example demonstrates that highly accurate dynamical simulations are possible, in some cases, using a very small number of static FEA simulations.

Generation of a Metamodel for a Micromachined Accelerometer using T-SpiceTM and the Iz-Optimality Option of I-OPTTM

ISBN: 0-9666135-7-0
Pages: 741