Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 4: System-Level Modeling and Simulation of MEMS
	Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
Authors:	H. Xie, L. Erdman, Q. Jing and G.K. Fedder
Affilation:	Carnegie Mellon University, US
Pages:	181 - 184
Keywords:	vertical actuation, NODAS library, behavioral simulation, comb drive, CMOS micromachining process
Abstract:	This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 mm, and resonant frequency 6.17 kHz, which are in good agreement with the field simulation and the behavioral simulation results using the NODAS library [1]. The advantages of the z-axis actuator include compatibility with standard CMOS processes and easy implementation of 3-axis microstages, integrated position sensing components and motion control circuits.
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ISBN:	0-9666135-7-0
Pages:	741
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