Authors: H. Xie, L. Erdman, Q. Jing and G.K. Fedder
Affilation: Carnegie Mellon University, United States
Pages: 181 - 184
Keywords: vertical actuation, NODAS library, behavioral simulation, comb drive, CMOS micromachining process
This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 mm, and resonant frequency 6.17 kHz, which are in good agreement with the field simulation and the behavioral simulation results using the NODAS library . The advantages of the z-axis actuator include compatibility with standard CMOS processes and easy implementation of 3-axis microstages, integrated position sensing components and motion control circuits.