MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling and Simulation of MEMS Chapter 4

Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications

Authors: A. Mohamed, H. Elsimary and M. Ismail

Affilation: Ohio State University, United States

Pages: 174 - 177

Keywords: RF VCO, RF MEMS devices, High-Q resonator, MEMS tunable capacitor

In this work a new design of a tunable capacitor based on microelectromechanical system (MEMS) technology is presented. The design of high Q- tunable capacitor has been accomplished through bulk micromachining process with all metal microstructure. A standard IC fabrication process (HP.5m) is used to carry out the tunable capacitor. The main features of this high-Q MEMS tunable capacitor is the enabling of a complete monolithic fabrication of RF VCOs using on-chip IC compatible devices. Simulation results are presented to show the MEMS capacitor performance when used in RF VCO circuit. The tunable capacitor shows a high-Q of about 60 at 950 MHz of the VCO oscillating frequency.

ISBN: 0-9666135-7-0
Pages: 741

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