Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 4: System-Level Modeling and Simulation of MEMS

HDL-A-Model of a Micromachined Tuning Fork Gyroscope

Authors:J. Eichholz, J. Quenzer, O. Schwarzelbach, M. WeiƟ and B. Wenk
Affilation:FhG-ISIT, DE
Pages:170 - 173
Keywords:HDLA-model, gyroscope, electrical simulations
Abstract:The HDLA-model presented describes the electrical and mechanical behavior of a micromachined silicon tuning fork gyroscope. This gyro will be excited by electrostatic forces and the Coriolis induced torsion motion will be read out capacitively. To control the behavior of the gyro several control nodes are available. In addition the model includes capacitors for a force feedback operation and for tuning of the torsional resonance frequency. The design of the element is described by 25 mechanical parameters. Verification of the model is done by developing concurrently a mathematical model that solves the differential equations. In addition the simulations are compared with measurement results. The model can be used for operation point analysis, transient and frequency simulations.
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