Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 4: System-Level Modeling and Simulation of MEMS

Modeling and Optimization of Bi-stable Optical Switch

Authors:H. Maekoba, P. Helin, G. Reyne, T. Bourouina and H. Fujita
Affilation:Cybernet Systems Co. Ltd., JP
Pages:166 - 169
Keywords:optical switch, bi-stable, electro-magnetic actuation, ANSYS simulation, optimization
Abstract:High performance silicon-based, micro-optical switch are being developed for application to optical networks. The mechanical part was fabricated in a one-level mask step by bulk micromachining of (100) monocrystalline silicon with KOH. The resulting structure was assembled with a 100mm-thick Permalloy piece and then, it was associated to a small magnetic circuit for its electromagnetic actuation. In order to avoid power consumption during ON and OFF states, a bi-stable operation principle is proposed. The bi-stable behavior is obtained thanks to a stable mechanical position due to the cantilever stiffness and a second magnetic stable position due to a magnet. Switching operation is provided by electrical currents in windings. The purpose of the present paper is to present a study on modeling and optimization of this system by means of FEM simulations using ANSYS software. Iterative magneto-mechanical simulations are performed. Optimization of dimensions and material properties is presented.
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