Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 4: System-Level Modeling and Simulation of MEMS

Investigation of the Dynamics of Microdevices - As a Design Tool

Authors:D.J. Seter, O. Degani, S. Kaldor, E. Scher and Y. Nemirovsky
Affilation:RAFAEL Microsystems Group, IL
Pages:158 - 161
Keywords:microgyroscopes, dynamics, simulations, squeeze-film, angular pull-in
Abstract:When designing microaccelerometers, microgyroscopes and other microdevices, there is a strong need for dynamic understanding in system level. Thus, dynamic simulation is a part of many CAD tools for MEMS [1]. In this work, a relatively simple approach is presented for the study of the dynamics of microdevices. The theoretical derivation of the equations of motion is based on the Newton-Euler approach and provides a matrix form that is convenient to integrate. The dynamical model combined with models for electrostatic actuation and squeeze film effects [2] is verified by comparison with experimental results: the decaying motion of a microresonator due to an electrostatic impulse. Good agreement between simulation and measurements is shown. The pull-in angle and voltage are simulated and compared to theoretical calculations that were presented by the authors [3]. Finally, the model is used for parametric study of the influence of geometrical variations on the dynamics of a microgyroscope.
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