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 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 4: System-Level Modeling and Simulation of MEMS |
| | Investigation of the Dynamics of Microdevices - As a Design Tool | | Authors: | D.J. Seter, O. Degani, S. Kaldor, E. Scher and Y. Nemirovsky | | Affilation: | RAFAEL Microsystems Group, Israel | | Pages: | 158 - 161 | | Keywords: | microgyroscopes, dynamics, simulations, squeeze-film, angular pull-in | | Abstract: | When designing microaccelerometers, microgyroscopes and other microdevices, there is a strong need for dynamic understanding in system level. Thus, dynamic simulation is a part of many CAD tools for MEMS [1]. In this work, a relatively simple approach is presented for the study of the dynamics of microdevices. The theoretical derivation of the equations of motion is based on the Newton-Euler approach and provides a matrix form that is convenient to integrate. The dynamical model combined with models for electrostatic actuation and squeeze film effects [2] is verified by comparison with experimental results: the decaying motion of a microresonator due to an electrostatic impulse. Good agreement between simulation and measurements is shown. The pull-in angle and voltage are simulated and compared to theoretical calculations that were presented by the authors [3]. Finally, the model is used for parametric study of the influence of geometrical variations on the dynamics of a microgyroscope. |  | View paper | | ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
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