 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 4: System-Level Modeling and Simulation of MEMS |
| | Layout Synthesis of CMOS MEMS Accelerometers |
| Authors: | V. Gupta and T. Mukherjee |
| Affilation: | Carnegie Mellon University, U.S.A. |
| Pages: | 150 - 153 |
| Keywords: | synthesis, CAD, CMOS MEMS accelerometer |
| Abstract: | An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parame-trized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped parameter analytical equa-tions. The design problem is then formulated into a non-lin-ear constrained optimization problem. Such an approach to automated design of MEMS devices helps the designer to explore design trade-offs efficiently. Synthesis of cell level devices is also required for structured design of integrated MEMS. Designs for a CMOS MEMS accelerometer for dif-ferent optimization objectives, as well as possible design trade-offs are discussed. |
 | View paper |
| ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
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