MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling and Simulation of MEMS Chapter 4

System Level Simulation of an Electrostatically Levitated Disk

Authors: M. Kraft and A. Evans

Affilation: University of Southampton, United Kingdom

Pages: 130 - 133

Keywords: electrostatic levitation, inertial sensors, system-level simulation

This paper describes the derivation of a system-level model for a micromachined disk which is levitated by electrostatic forces. Such a system has many potential applications for inertial sensors, micro-motors, microfluidic and micro-optical devices. As a simulation tool Matlab/Simulink was used since it can easily handle different domains such as electrical and mechanical without special arrangements. Multi-axis electro-mechanical sigma-delta modulators were chosen to control the various degrees of freedom of the levitated disk. Of special interest is the power-up phase at the end of which the control system has to ensure that the disk is centred between the top and bottom electrodes.

System Level Simulation of an Electrostatically Levitated Disk

ISBN: 0-9666135-7-0
Pages: 741