System Level Simulation of an Electrostatically Levitated Disk

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 4: System-Level Modeling and Simulation of MEMS
	System Level Simulation of an Electrostatically Levitated Disk
Authors:	M. Kraft and A. Evans
Affilation:	University of Southampton, UK
Pages:	130 - 133
Keywords:	electrostatic levitation, inertial sensors, system-level simulation
Abstract:	This paper describes the derivation of a system-level model for a micromachined disk which is levitated by electrostatic forces. Such a system has many potential applications for inertial sensors, micro-motors, microfluidic and micro-optical devices. As a simulation tool Matlab/Simulink was used since it can easily handle different domains such as electrical and mechanical without special arrangements. Multi-axis electro-mechanical sigma-delta modulators were chosen to control the various degrees of freedom of the levitated disk. Of special interest is the power-up phase at the end of which the control system has to ensure that the disk is centred between the top and bottom electrodes.
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ISBN:	0-9666135-7-0
Pages:	741
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