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 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 4: System-Level Modeling and Simulation of MEMS |
| | System Level Simulation of an Electrostatically Levitated Disk | | Authors: | M. Kraft and A. Evans | | Affilation: | University of Southampton, United Kingdom | | Pages: | 130 - 133 | | Keywords: | electrostatic levitation, inertial sensors, system-level simulation | | Abstract: | This paper describes the derivation of a system-level model for a micromachined disk which is levitated by electrostatic forces. Such a system has many potential applications for inertial sensors, micro-motors, microfluidic and micro-optical devices. As a simulation tool Matlab/Simulink was used since it can easily handle different domains such as electrical and mechanical without special arrangements. Multi-axis electro-mechanical sigma-delta modulators were chosen to control the various degrees of freedom of the levitated disk. Of special interest is the power-up phase at the end of which the control system has to ensure that the disk is centred between the top and bottom electrodes. |  | View paper | | ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
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