Nano Science and Technology Institute
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Chapter 4:

System-Level Modeling and Simulation of MEMS

-System Level Simulation of an Electrostatically Levitated Disk
 M. Kraft and A. Evans
 University of Southampton, United Kingdom
-Compact MEMS Modeling for Design Studies
 P. Voigt and G. Wachutka
 University of Technology, Germany
-Methodology of Macromodeling Demonstrated on Force Feedback S/D-Architectures
 M. Hardtmann, R. Aigner, R. Nadal and G. Wachutka
 Munich University of Technology, Germany
-Towards Microelectrofluidic System (MEFS) Computing and Architecture
 A. Dewey, R.B. Fair, J. Jopling, J. Ding, T. Zhang, F. Cao, B. Schreiner and M. Pollack
 Duke University, U.S.A.
-Macro-Modeling of Systems Including Free-Space Optical MEMS
 T.P. Kurzweg and A.S. Morris
 Uiversity of Pittsburgh, U.S.A.
-Layout Synthesis of CMOS MEMS Accelerometers
 V. Gupta and T. Mukherjee
 Carnegie Mellon University, U.S.A.
-Electrostatic Spring Effect on the Dynamic Performance of Micro Resonators
 E.H. Francis, R. Kumaran, B.L. Chua and V.J. Logeeswaran
 National University of Singapore, Singapore
-Investigation of the Dynamics of Microdevices - As a Design Tool
 D.J. Seter, O. Degani, S. Kaldor, E. Scher and Y. Nemirovsky
 RAFAEL Microsystems Group, Israel
-Compact Damping Models for Lateral Structures Including Gas Rarefaction Effects
 T. Veijola
 Helsinki University of Technology, Finland
-Modeling and Optimization of Bi-stable Optical Switch
 H. Maekoba, P. Helin, G. Reyne, T. Bourouina and H. Fujita
 Cybernet Systems Co. Ltd., Japan
-HDL-A-Model of a Micromachined Tuning Fork Gyroscope
 J. Eichholz, J. Quenzer, O. Schwarzelbach, M. Weiß and B. Wenk
 FhG-ISIT, Germany
-Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications
 A. Mohamed, H. Elsimary and M. Ismail
 Ohio State University, U.S.A.
-Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators
 Y. Chen, Y. Shroff and W.G. Oldham
 University of California, U.S.A.
-Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
 H. Xie, L. Erdman, Q. Jing and G.K. Fedder
 Carnegie Mellon University, U.S.A.
ISBN:0-9666135-7-0
Pages:741
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