Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Chapter 4:

System-Level Modeling and Simulation of MEMS

-System Level Simulation of an Electrostatically Levitated Disk
 M. Kraft and A. Evans
 University of Southampton, UK
-Compact MEMS Modeling for Design Studies
 P. Voigt and G. Wachutka
 University of Technology, DE
-Methodology of Macromodeling Demonstrated on Force Feedback S/D-Architectures
 M. Hardtmann, R. Aigner, R. Nadal and G. Wachutka
 Munich University of Technology, DE
-Towards Microelectrofluidic System (MEFS) Computing and Architecture
 A. Dewey, R.B. Fair, J. Jopling, J. Ding, T. Zhang, F. Cao, B. Schreiner and M. Pollack
 Duke University, US
-Macro-Modeling of Systems Including Free-Space Optical MEMS
 T.P. Kurzweg and A.S. Morris
 Uiversity of Pittsburgh, US
-Layout Synthesis of CMOS MEMS Accelerometers
 V. Gupta and T. Mukherjee
 Carnegie Mellon University, US
-Electrostatic Spring Effect on the Dynamic Performance of Micro Resonators
 E.H. Francis, R. Kumaran, B.L. Chua and V.J. Logeeswaran
 National University of Singapore, SG
-Investigation of the Dynamics of Microdevices - As a Design Tool
 D.J. Seter, O. Degani, S. Kaldor, E. Scher and Y. Nemirovsky
 RAFAEL Microsystems Group, IL
-Compact Damping Models for Lateral Structures Including Gas Rarefaction Effects
 T. Veijola
 Helsinki University of Technology, FI
-Modeling and Optimization of Bi-stable Optical Switch
 H. Maekoba, P. Helin, G. Reyne, T. Bourouina and H. Fujita
 Cybernet Systems Co. Ltd., JP
-HDL-A-Model of a Micromachined Tuning Fork Gyroscope
 J. Eichholz, J. Quenzer, O. Schwarzelbach, M. WeiƟ and B. Wenk
 FhG-ISIT, DE
-Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications
 A. Mohamed, H. Elsimary and M. Ismail
 Ohio State University, US
-Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators
 Y. Chen, Y. Shroff and W.G. Oldham
 University of California, US
-Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
 H. Xie, L. Erdman, Q. Jing and G.K. Fedder
 Carnegie Mellon University, US
ISBN:0-9666135-7-0
Pages:741
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