MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling and Simulation of MEMS Chapter 4

System Level Simulation of an Electrostatically Levitated Disk
M. Kraft and A. Evans
University of Southampton, UK

Compact MEMS Modeling for Design Studies
P. Voigt and G. Wachutka
University of Technology, DE

Methodology of Macromodeling Demonstrated on Force Feedback S/D-Architectures
M. Hardtmann, R. Aigner, R. Nadal and G. Wachutka
Munich University of Technology, DE

Towards Microelectrofluidic System (MEFS) Computing and Architecture
A. Dewey, R.B. Fair, J. Jopling, J. Ding, T. Zhang, F. Cao, B. Schreiner and M. Pollack
Duke University, US

Macro-Modeling of Systems Including Free-Space Optical MEMS
T.P. Kurzweg and A.S. Morris
Uiversity of Pittsburgh, US

Layout Synthesis of CMOS MEMS Accelerometers
V. Gupta and T. Mukherjee
Carnegie Mellon University, US

Electrostatic Spring Effect on the Dynamic Performance of Micro Resonators
E.H. Francis, R. Kumaran, B.L. Chua and V.J. Logeeswaran
National University of Singapore, SG

Investigation of the Dynamics of Microdevices - As a Design Tool
D.J. Seter, O. Degani, S. Kaldor, E. Scher and Y. Nemirovsky
RAFAEL Microsystems Group, IL

Compact Damping Models for Lateral Structures Including Gas Rarefaction Effects
T. Veijola
Helsinki University of Technology, FI

Modeling and Optimization of Bi-stable Optical Switch
H. Maekoba, P. Helin, G. Reyne, T. Bourouina and H. Fujita
Cybernet Systems Co. Ltd., JP

HDL-A-Model of a Micromachined Tuning Fork Gyroscope
J. Eichholz, J. Quenzer, O. Schwarzelbach, M. Weiß and B. Wenk
FhG-ISIT, DE

Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications
A. Mohamed, H. Elsimary and M. Ismail
Ohio State University, US

Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators
Y. Chen, Y. Shroff and W.G. Oldham
University of California, US

Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
H. Xie, L. Erdman, Q. Jing and G.K. Fedder
Carnegie Mellon University, US


ISBN: 0-9666135-7-0
Pages: 741