System-Level Modeling and Simulation of MEMS

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 4: System-Level Modeling and Simulation of MEMS
-	System Level Simulation of an Electrostatically Levitated Disk
	M. Kraft and A. Evans
	University of Southampton, UK
-	Compact MEMS Modeling for Design Studies
	P. Voigt and G. Wachutka
	University of Technology, DE
-	Methodology of Macromodeling Demonstrated on Force Feedback S/D-Architectures
	M. Hardtmann, R. Aigner, R. Nadal and G. Wachutka
	Munich University of Technology, DE
-	Towards Microelectrofluidic System (MEFS) Computing and Architecture
	A. Dewey, R.B. Fair, J. Jopling, J. Ding, T. Zhang, F. Cao, B. Schreiner and M. Pollack
	Duke University, US
-	Macro-Modeling of Systems Including Free-Space Optical MEMS
	T.P. Kurzweg and A.S. Morris
	Uiversity of Pittsburgh, US
-	Layout Synthesis of CMOS MEMS Accelerometers
	V. Gupta and T. Mukherjee
	Carnegie Mellon University, US
-	Electrostatic Spring Effect on the Dynamic Performance of Micro Resonators
	E.H. Francis, R. Kumaran, B.L. Chua and V.J. Logeeswaran
	National University of Singapore, SG
-	Investigation of the Dynamics of Microdevices - As a Design Tool
	D.J. Seter, O. Degani, S. Kaldor, E. Scher and Y. Nemirovsky
	RAFAEL Microsystems Group, IL
-	Compact Damping Models for Lateral Structures Including Gas Rarefaction Effects
	T. Veijola
	Helsinki University of Technology, FI
-	Modeling and Optimization of Bi-stable Optical Switch
	H. Maekoba, P. Helin, G. Reyne, T. Bourouina and H. Fujita
	Cybernet Systems Co. Ltd., JP
-	HDL-A-Model of a Micromachined Tuning Fork Gyroscope
	J. Eichholz, J. Quenzer, O. Schwarzelbach, M. Weiß and B. Wenk
	FhG-ISIT, DE
-	Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications
	A. Mohamed, H. Elsimary and M. Ismail
	Ohio State University, US
-	Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators
	Y. Chen, Y. Shroff and W.G. Oldham
	University of California, US
-	Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
	H. Xie, L. Erdman, Q. Jing and G.K. Fedder
	Carnegie Mellon University, US
ISBN:	0-9666135-7-0
Pages:	741
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