Modeling of Focused Ion Beam Trimming of Cantilever Beams
Authors:
T. Lam and R.B. Darling
Affilation:
Univeristy of Washington, U.S.A.
Pages:
79 - 82
Keywords:
focused ion beam trimming, cantilever beams, finite element method
Abstract:
A finite element model of the cantilever beam is implemented to include a non-uniform thickness along its length, due to focused ion beam trimming. A quasi-static, iterative approach is used to calculate the cantilever profile for a given bias voltage. Two focused ion beam trimming strategies are compared. The snap-down voltage as a function of milling depth or width is calculated.
