Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 2: Process Modeling

Modeling of Focused Ion Beam Trimming of Cantilever Beams

Authors:T. Lam and R.B. Darling
Affilation:Univeristy of Washington, US
Pages:79 - 82
Keywords:focused ion beam trimming, cantilever beams, finite element method
Abstract:A finite element model of the cantilever beam is implemented to include a non-uniform thickness along its length, due to focused ion beam trimming. A quasi-static, iterative approach is used to calculate the cantilever profile for a given bias voltage. Two focused ion beam trimming strategies are compared. The snap-down voltage as a function of milling depth or width is calculated.
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