Authors: T. Hoffmann, K.F. Dombrowski and V. Senez
Affilation: IEMN-ISEN, UMR CNRS, France
Pages: 59 - 62
Keywords: isolation, viscoelasticity, raman, anisotropy
Shallow trench isolations (STI) process needs careful optimization of thermal annealings in order to minimize leakage currents which may result from excessive mechanical stresses. Due to its intrinsic three-dimensional structure, conventional 2D process simulator is no more relevant. This paper examines stress generation in STI using for the first time a 3D fully non-linear viscoelastic oxidation model implemented with the Finite Element Method.