Systematic Design and Optimization of Multi-Material, Multi-Degree-of-Freedom Micro Actuators

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 2: Process Modeling
	Systematic Design and Optimization of Multi-Material, Multi-Degree-of-Freedom Micro Actuators
Authors:	O. Sigmund
Affilation:	Technical University of Denmark, DK
Pages:	36 - 39
Keywords:	actuators, microelectromechanical systems, MEMS, topology optimization, finite element analysis
Abstract:	The paper reports an automated method for the synthesis of multi-material, multi-degree-of-freedom micro actuators. The method is based on topology optimization, an iterative computational scheme consisting of alternating finite element analyses, sensitivity analyses and optimal material redistributions.
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ISBN:	0-9666135-7-0
Pages:	741
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