Authors: O. Sigmund
Affilation: Technical University of Denmark, Denmark
Pages: 36 - 39
Keywords: actuators, microelectromechanical systems, MEMS, topology optimization, finite element analysis
The paper reports an automated method for the synthesis of multi-material, multi-degree-of-freedom micro actuators. The method is based on topology optimization, an iterative computational scheme consisting of alternating finite element analyses, sensitivity analyses and optimal material redistributions.