MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Process Modeling Chapter 2

Systematic Design and Optimization of Multi-Material, Multi-Degree-of-Freedom Micro Actuators

Authors: O. Sigmund

Affilation: Technical University of Denmark, Denmark

Pages: 36 - 39

Keywords: actuators, microelectromechanical systems, MEMS, topology optimization, finite element analysis

Abstract:
The paper reports an automated method for the synthesis of multi-material, multi-degree-of-freedom micro actuators. The method is based on topology optimization, an iterative computational scheme consisting of alternating finite element analyses, sensitivity analyses and optimal material redistributions.

Systematic Design and Optimization of Multi-Material, Multi-Degree-of-Freedom Micro Actuators

ISBN: 0-9666135-7-0
Pages: 741