Systematic Design and Optimization of Multi-Material, Multi-Degree-of-Freedom Micro Actuators
Authors:
O. Sigmund
Affilation:
Technical University of Denmark, Denmark
Pages:
36 - 39
Keywords:
actuators, microelectromechanical systems, MEMS, topology optimization, finite element analysis
Abstract:
The paper reports an automated method for the synthesis of multi-material, multi-degree-of-freedom micro actuators. The method is based on topology optimization, an iterative computational scheme consisting of alternating finite element analyses, sensitivity analyses and optimal material redistributions.
