Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
 
Chapter 2: Process Modeling
 

Systematic Design and Optimization of Multi-Material, Multi-Degree-of-Freedom Micro Actuators

Authors:O. Sigmund
Affilation:Technical University of Denmark, DK
Pages:36 - 39
Keywords:actuators, microelectromechanical systems, MEMS, topology optimization, finite element analysis
Abstract:The paper reports an automated method for the synthesis of multi-material, multi-degree-of-freedom micro actuators. The method is based on topology optimization, an iterative computational scheme consisting of alternating finite element analyses, sensitivity analyses and optimal material redistributions.
Systematic Design and Optimization of Multi-Material, Multi-Degree-of-Freedom Micro ActuatorsView PDF of paper
ISBN:0-9666135-7-0
Pages:741
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