MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Process Modeling Chapter 2

Systematic Design and Optimization of Multi-Material, Multi-Degree-of-Freedom Micro Actuators

Authors: O. Sigmund

Affilation: Technical University of Denmark, Denmark

Pages: 36 - 39

Keywords: actuators, microelectromechanical systems, MEMS, topology optimization, finite element analysis

Abstract:
The paper reports an automated method for the synthesis of multi-material, multi-degree-of-freedom micro actuators. The method is based on topology optimization, an iterative computational scheme consisting of alternating finite element analyses, sensitivity analyses and optimal material redistributions.


ISBN: 0-9666135-7-0
Pages: 741

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