Authors: M. Spasojevic, P. Ljung and M. Bächtold
Affilation: Coyote Systems, Inc., United States
Pages: 24 - 27
Keywords: 3D surface modeling, BEM, boundary element method
In this paper we present a new approach to creation of 3D surface models of MEMS devices from 2D layout masks suitable for analysis using the Boundary Element Method (BEM) . The algorithm is implemented as a part of the commercially available BEM based multi-physics solver AutoMEMS  and is responsible for automatically generating surface 3D models from a layout (GDSII or CIF) and a user supplied process description. The surface model is then automatically meshed for numerical analysis with 3D BEM solver.