Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
 
Chapter 2: Process Modeling
 

Creation of 3D Surface Models from 2D Layouts for BEM Anaylysis

Authors:M. Spasojevic, P. Ljung and M. B├Ąchtold
Affilation:Coyote Systems, Inc., US
Pages:24 - 27
Keywords:3D surface modeling, BEM, boundary element method
Abstract:In this paper we present a new approach to creation of 3D surface models of MEMS devices from 2D layout masks suitable for analysis using the Boundary Element Method (BEM) [1]. The algorithm is implemented as a part of the commercially available BEM based multi-physics solver AutoMEMS [2] and is responsible for automatically generating surface 3D models from a layout (GDSII or CIF) and a user supplied process description. The surface model is then automatically meshed for numerical analysis with 3D BEM solver.
Creation of 3D Surface Models from 2D Layouts for BEM AnaylysisView PDF of paper
ISBN:0-9666135-7-0
Pages:741
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