 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 2: Process Modeling |
| | Creation of 3D Surface Models from 2D Layouts for BEM Anaylysis |
| Authors: | M. Spasojevic, P. Ljung and M. Bächtold |
| Affilation: | Coyote Systems, Inc., U.S.A. |
| Pages: | 24 - 27 |
| Keywords: | 3D surface modeling, BEM, boundary element method |
| Abstract: | In this paper we present a new approach to creation of 3D surface models of MEMS devices from 2D layout masks suitable for analysis using the Boundary Element Method (BEM) [1]. The algorithm is implemented as a part of the commercially available BEM based multi-physics solver AutoMEMS [2] and is responsible for automatically generating surface 3D models from a layout (GDSII or CIF) and a user supplied process description. The surface model is then automatically meshed for numerical analysis with 3D BEM solver. |
 | View paper |
| ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up | |
