Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 2: Process Modeling

Creation of 3D Surface Models from 2D Layouts for BEM Anaylysis

Authors:M. Spasojevic, P. Ljung and M. B├Ąchtold
Affilation:Coyote Systems, Inc., US
Pages:24 - 27
Keywords:3D surface modeling, BEM, boundary element method
Abstract:In this paper we present a new approach to creation of 3D surface models of MEMS devices from 2D layout masks suitable for analysis using the Boundary Element Method (BEM) [1]. The algorithm is implemented as a part of the commercially available BEM based multi-physics solver AutoMEMS [2] and is responsible for automatically generating surface 3D models from a layout (GDSII or CIF) and a user supplied process description. The surface model is then automatically meshed for numerical analysis with 3D BEM solver.
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