MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Process Modeling Chapter 2

Creation of 3D Surface Models from 2D Layouts for BEM Anaylysis

Authors: M. Spasojevic, P. Ljung and M. Bächtold

Affilation: Coyote Systems, Inc., United States

Pages: 24 - 27

Keywords: 3D surface modeling, BEM, boundary element method

Abstract:
In this paper we present a new approach to creation of 3D surface models of MEMS devices from 2D layout masks suitable for analysis using the Boundary Element Method (BEM) [1]. The algorithm is implemented as a part of the commercially available BEM based multi-physics solver AutoMEMS [2] and is responsible for automatically generating surface 3D models from a layout (GDSII or CIF) and a user supplied process description. The surface model is then automatically meshed for numerical analysis with 3D BEM solver.

Creation of 3D Surface Models from 2D Layouts for BEM Anaylysis

ISBN: 0-9666135-7-0
Pages: 741