Analysis of Realistic Large MEMS Devices

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 17: Software Tools, CAD Systems
	Analysis of Realistic Large MEMS Devices
Authors:	P. Ljung, M. Bächtold and M. Spasojevic
Affilation:	Coyote Systems, Inc., US
Pages:	731 - 734
Keywords:	3D field solver, BEM, boundary element method, adaptive refinement, coupled fields
Abstract:	A high-speed high-accuracy 3D field solver for the solution of coupled multi-physics encountered in MEMS is presented. The software AutoMEMS enables automatic model generation from layout, automatic meshing, adaptive mesh refinement of large complex geometries encountered with realistic MEMS devices. Arbitrary types of materials, general geometries, and all types of boundary conditions are supported to solve cou-pled electro-mechanical 3D fields.
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ISBN:	0-9666135-7-0
Pages:	741
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