Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Software Tools, CAD Systems

Analysis of Realistic Large MEMS Devices

Authors:P. Ljung, M. B├Ąchtold and M. Spasojevic
Affilation:Coyote Systems, Inc., US
Pages:731 - 734
Keywords:3D field solver, BEM, boundary element method, adaptive refinement, coupled fields
Abstract:A high-speed high-accuracy 3D field solver for the solution of coupled multi-physics encountered in MEMS is presented. The software AutoMEMS enables automatic model generation from layout, automatic meshing, adaptive mesh refinement of large complex geometries encountered with realistic MEMS devices. Arbitrary types of materials, general geometries, and all types of boundary conditions are supported to solve cou-pled electro-mechanical 3D fields.
Analysis of Realistic Large MEMS DevicesView PDF of paper
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