MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 17

Modified Nodal Analysis for MEMS with Multi-Energy Domains

Authors: J.V. Clark, N. Zhou and K.S.J. Pister

Affilation: University of California at Berkeley, United States

Pages: 723 - 726

Keywords: modified nodal analysis (MNA), static, steady-state, transient, SUGAR, accelerating frames

A modified nodal analysis approach for the design, simulation, and display of three-dimensional microelectro-mechanical systems with coupled energy domains is presented. Static, steady-state, and transient algorithms are introduced followed by examples. Transient and static analysis in noninertial frames is now supported. Simulated results include (1) three-dimensional modal analysis of a torsional micro-mirror, (2) static analysis of a gap-closing actuator with coupled circuit, mechanical, and electrostatic energy domains, (3) the induced current response of a comb-driven multi-mode resonator, and (4) the transient response of a gap-closing actuator due to a time varying voltage showing a nonlinearly varying resonance frequency and displacement.

Modified Nodal Analysis for MEMS with Multi-Energy Domains

ISBN: 0-9666135-7-0
Pages: 741