Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Software Tools, CAD Systems

Modified Nodal Analysis for MEMS with Multi-Energy Domains

Authors:J.V. Clark, N. Zhou and K.S.J. Pister
Affilation:University of California at Berkeley, US
Pages:723 - 726
Keywords:modified nodal analysis (MNA), static, steady-state, transient, SUGAR, accelerating frames
Abstract:A modified nodal analysis approach for the design, simulation, and display of three-dimensional microelectro-mechanical systems with coupled energy domains is presented. Static, steady-state, and transient algorithms are introduced followed by examples. Transient and static analysis in noninertial frames is now supported. Simulated results include (1) three-dimensional modal analysis of a torsional micro-mirror, (2) static analysis of a gap-closing actuator with coupled circuit, mechanical, and electrostatic energy domains, (3) the induced current response of a comb-driven multi-mode resonator, and (4) the transient response of a gap-closing actuator due to a time varying voltage showing a nonlinearly varying resonance frequency and displacement.
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