Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Software Tools, CAD Systems

Numerical Simulation of Micro Assembly Techniques in MEMS Devices

Authors:N. Finch, D. Keating and Y. He
Affilation:IntelliSense Corporation, US
Pages:720 - 722
Keywords:numerical simulation, micro-assembly techniques, MEMS devices
Abstract:This paper presents research on numerical simulation of the micro-assembly of MEMS devices. Recent developments in MEMS devices ñ making use of multiple deposition layers, micro-fabricated hinges, and actuators ñ have enabled fabrication of MEMS devices that can deform out of plane. Applications include latching mechanisms and tilting mirrors. The simulation methodology has been developed which allows a MEMS designer to take into account the required actuation forces, interfacing mechanisms, and time constraints for micro-assembly. The simulation results rely on multi-stage contact analysis, dynamic analysis, and large displacement theory. Results will be presented for two case examples.
Numerical Simulation of Micro Assembly Techniques in MEMS DevicesView PDF of paper
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