MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 17

GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS

Authors: N. Wilson, K. Wang, D. Yergeau and R.W. Dutton

Affilation: Stanford University, United States

Pages: 716 - 719

Keywords: geometry, MEMS, solid modeling, levelset, TCAD

Abstract:
This paper will detail the capabilities of a new geometric modeling tool, called Geodesic, which is being released in source code form to the general community. In addition to providing geometric operations to create geometry useful in MEMS simulation, it uniquely offers a fully integrated 3-D levelset kernel that permits highly accurate physically based deposition and etching simulation.

GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS

ISBN: 0-9666135-7-0
Pages: 741