Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
 
Chapter 17: Software Tools, CAD Systems
 

GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS

Authors:N. Wilson, K. Wang, D. Yergeau and R.W. Dutton
Affilation:Stanford University, US
Pages:716 - 719
Keywords:geometry, MEMS, solid modeling, levelset, TCAD
Abstract:This paper will detail the capabilities of a new geometric modeling tool, called Geodesic, which is being released in source code form to the general community. In addition to providing geometric operations to create geometry useful in MEMS simulation, it uniquely offers a fully integrated 3-D levelset kernel that permits highly accurate physically based deposition and etching simulation.
GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMSView PDF of paper
ISBN:0-9666135-7-0
Pages:741
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