Authors: N. Wilson, K. Wang, D. Yergeau and R.W. Dutton
Affilation: Stanford University, United States
Pages: 716 - 719
Keywords: geometry, MEMS, solid modeling, levelset, TCAD
This paper will detail the capabilities of a new geometric modeling tool, called Geodesic, which is being released in source code form to the general community. In addition to providing geometric operations to create geometry useful in MEMS simulation, it uniquely offers a fully integrated 3-D levelset kernel that permits highly accurate physically based deposition and etching simulation.