CFD-Micromesh: A Fast Geometrical Modeling and Mesh Generation Tool for 3D Microsystem Simulations

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 17: Software Tools, CAD Systems
	CFD-Micromesh: A Fast Geometrical Modeling and Mesh Generation Tool for 3D Microsystem Simulations
Authors:	Z. Tan, M. Furmanczyk, M. Turowski and A.J. Przekwas
Affilation:	CFD Research Corporation, US
Pages:	712 - 715
Keywords:	TCAD, mesh generation, 3D modeling
Abstract:	In this work, a new fully automated geometrical modeling and meshing tool is described. It imports standard layout formats (CIF, GDSII, DXF), images (GIF, JPG), and 3D boundary representations (STL). A 3D model is then generated by simulating 3D operations (etching, deposition, insertion, etc.) specified by the process data or the user. A 3D finite element mesh with tagged boundary and volume conditions is then automatically created. The automatic generation of 3D model and mesh takes typically a couple of minutes on a current PC machine. The paper will present the geometry/meshing engines, user interfaces, and will demonstrate them on a range of microsystem applications.
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ISBN:	0-9666135-7-0
Pages:	741
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