Authors: S. Reh, P. Lethbridge and D.F. Ostergaard
Affilation: ANSYS, Inc., United States
Pages: 708 - 711
Keywords: micro-electromechanical-systems (MEMS), finite-element analysis, manufacturing tolerances, probabilistic analysis
The paper demonstrates the use of probabilistic methods to assess the electromechanical behavior of micro electromechanical systems (MEMS) under the presence of micromachining manufacturing and process uncertainties. Probabilistic Methods are used to assess uncertainties involved in the manufacturing of MEMS devices. Probabilistic methods guide the design of these devices to achieve a robust and reliable design in a most efficient way. The methods illustrated here are implemented in the latest version of the ANSYS Finite-Element program.